What Is The Difference between EFU (Equipment Fan Filter Unit) And FFU (Fan Filter Unit)?

The EFU (Equipment Fan Filter Unit) is a device used in cleanrooms and is similar to the commonly seen FFU (Fan Filter Unit), but there are some differences between the two.

The EFU is specifically designed for equipment application, such as photolithography machines, stockers, indexers, coaters, and cleaning machines, while the FFU is generally used in cleanrooms and installed on the ceiling.

In terms of installation, FFUs are standalone devices typically installed horizontally on the ceiling with the help of gravity and sealing installation with filters and ceiling grids. On the other hand, EFUs have a more complex installation process. The EFU box and filter are usually fixed together with bolts and nuts, and the EFU unit is then securely fixed to the equipment using dedicated mounting brackets and bolts.

Furthermore, EFUs have different specifications, material requirements, maintenance methods, control systems, and operating parameters compared to FFUs. The thickness, dimensions, and material requirements of EFUs are specifically designed to meet the requirements of equipment applications. The maintenance methods may also vary, depending on the specific design and configuration of the EFU. The control systems used in EFUs may differ from the ones used in FFUs, and the operating parameters such as airflow and pressure may also be specifically tailored for equipment needs.

Overall, the EFU and FFU have different applications, installation methods, specifications, and operating parameters, highlighting their distinctive features and functionality in different cleanroom environments.