Addressing the Semiconductor "Space Crunch"

 

In advanced semiconductor manufacturing — including lithography, etching, thin-film deposition, and advanced packaging — process equipment is becoming increasingly complex with highly dense internal components. Traditional standard FFUs, typically 250mm to 350mm thick overall, are simply too bulky to fit into the narrow gaps within these tools.

This forces equipment engineers into a difficult trade-off: increase the overall equipment footprint to accommodate standard FFUs, or compromise on internal laminar flow purification — risking yield loss from particle contamination.

 

The numbers speak for themselves:

Parameter Standard FFU Deshengxin 70mm EFU
Typical thickness 200 – 350mm 70mm (fan housing)
Total installed thickness 250 – 400mm ~100mm (including filter)
Vertical space saving Up to 75% reduction

 

Infographic: Deshengxin 70mm Ultra-Thin EFU — Up to 75% Thickness Reduction Compared to Standard FFUs

Side-by-side comparison showing how Deshengxin's ultra-thin profile solves the semiconductor equipment space constraint.

EFU vs FFU — Understanding the Difference

While both systems use fans and high-efficiency filtration, they serve fundamentally different purposes in semiconductor manufacturing environments.

What is an FFU?
A Fan Filter Unit (FFU) is a modular air purification device typically installed in cleanroom ceiling grids. Its purpose is to generate uniform laminar airflow across the entire cleanroom space, maintaining the required cleanliness level for the overall facility.

 

What is an EFU?

An Equipment Fan Filter Unit (EFU) is a localised air purification device installed on or inside semiconductor tools. It delivers targeted laminar airflow directly around critical process zones, protecting wafer-level operations from particle contamination.

 

  Feature FFU (Fan Filter Unit) EFU (Equipment Fan Filter Unit)
  Installation Location Cleanroom ceiling grid Mounted on or inside equipment 
  Coverage Area Entire cleanroom Localised micro-environment
  Airflow High volume Precision-controlled
  Function Maintain room cleanliness Protect critical processes
  Typical Application Cleanroom infrastructure Semiconductor tools, lithography, etchers
  Form Factor Standard sizes (2×4ft, 4×4ft) Custom-designed, ultra-thin profiles
  Vibration Requirement Standard Strict (<0.5 mm/s RMS)
 
FFU vs EFU Installation Comparison
 

 

FFU systems maintain the overall cleanroom environment, while EFU systems provide localised contamination control for sensitive manufacturing processes. In semiconductor manufacturing, EFUs are essential for protecting wafer-level processes from particle contamination that standard cleanroom air cannot address.

 

 

The Source Factory Advantage: How We Achieve the 70mm Breakthrough

Many brands cannot achieve such extreme thinness because they rely on assembling off-the-shelf standard parts. Deshengxin, as a true full-supply-chain source purification factory, re-engineers from the ground up.
  • 70mm Custom Brushless Micro-Fan Housing

    We do not use standard parts; instead, we independently developed an EC brushless micro-fan matched specifically for ultra-thin structures. Even within the extremely flat 70mm housing, it delivers powerful static pressure and highly stable airflow.

  • High Dust-Capacity Mini-Pleat Filters
    The self-manufactured premium shallow-pleat HEPA/ULPA filter module perfectly mates with the 70mm housing. This ensures incredibly low resistance and filtration efficiency up to 99.9995% (@0.12μm) while keeping the total operational thickness to a strict ~100mm limit.
  • In-House Motor & Control System

    Unlike competitors who merely assemble outsourced parts, Deshengxin operates as a true source factory — we independently research, develop, and manufacture our own high-performance ultra-thin fans and specialised mini-pleat HEPA/ULPA filters. Because we completely control the core components, we perfectly optimised the internal geometry of the EFU.

 
 
Deshengxin 30,000m² Full-Chain Manufacturing Facility
 
        ✓ Unmatched R&D agility for custom                          dimensions
✓ Comprehensive quality control across all            critical applications
✓ Highly cost-effective innovation through             direct-from-factory pricing

 

Core Product Features

 

Core Product Features


 

 

Application Scenarios

 

 

 
More Scenarios
 
Wafer inspection and metrology tools       Die attach and wire bonding equipment             SMT pick & place machines
Lithium battery production lines                   Flat panel display (LCD/OLED) manufacturing
 

 

 

Technical Specifications

 

 

 Parameter Specification Description
 Total Height (Profile) Fan housing 70mm; Total thickness approx. 100mm with HEPA filter 
 Filtration Efficiency HEPA H14 (99.995%@0.3μm) / ULPA U15 (99.9995%@0.12μm)
 Housing Material SUS304 / SUS316 Stainless Steel / Aluminum Alloy / Powder-Coated Steel
 Air Velocity 0.35 - 0.55 m/s (Stepless adjustable via VFD)
 Motor Type Deshengxin Custom Ultra-Thin EC Brushless Micro-Motor
 Control System RS485 Smart Group Control / Independent Knob Regulation
 Typical Applications Semiconductor Front-End Equipment (EFEM), Advanced Packaging Tools, FPD/OLED Core Equipment, Micro/Nano Processing Instruments
 Certifications CE, ISO 9001,CQC
 Testing standard EN 1822:2009, IEST-RP-CC001

 

Customisation Capabilities

 
Every cleanroom and semiconductor tool is unique. Deshengxin's in-house engineering team can tailor EFU solutions to virtually any requirement:
 
 Customisation Option Description
 Custom dimensions Any width, height, and depth — including ultra-thin 70mm profiles
 Custom shapes L‑shaped, circular, or notched configurations for specific equipment integration
 Airflow design High airflow solutions up to 2 m/s+
 Filter efficiency H13, H14, U15, U16 — from HEPA to ULPA grades
 Frame material Aluminium alloy, galvanised steel, stainless steel 
 Control systems Individual, touchscreen, or computer-based group control with BACnet/Modbus
 Voltage options Customised for global export requirements
 Low vibration systems For EUV lithography and metrology tools
 
Whether you require specific housing materials, customised voltage for global export, or tailored dimensions to fit a specific machine chassis, our R&D team can design and prototype the exact equipment you need.

Quality Assurance

Every Deshengxin EFU and filter product undergoes rigorous testing before shipment:
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Individual test certificates are available upon request, ensuring full traceability and accountability.

 

Frequently Asked Questions


 

Q1: What is an EFU (Equipment Fan Filter Unit)?
A: An EFU is a self-contained air purification module mounted directly on or inside semiconductor equipment. Unlike FFUs designed for room-scale filtration, EFUs deliver targeted laminar airflow to protect critical processes like wafer fabrication, lithography, and etching.

Q2: What is the difference between an EFU and an FFU?
A: FFUs are ceiling-mounted and purify entire cleanrooms, while EFUs are equipment-mounted and provide localised clean air directly around sensitive tools. EFUs require stricter vibration control (<0.5 mm/s) and higher customisation for equipment integration.

Q3: How thin is Deshengxin's EFU?
A: Deshengxin's EFU features a 70mm fan housing with approximately 100mm total installed thickness (including filter) — one of the thinnest profiles available globally.

Q4: How does Deshengxin achieve such a thin profile?
A: Through full-chain manufacturing — we design and produce motors, fans, and control systems entirely in-house. We independently developed an EC brushless micro-fan specifically for ultra-thin structures, rather than using bulky off-the-shelf parts.

Q5: What cleanroom class does the 70mm EFU deliver?
A: With HEPA H13/H14 filters, it delivers ISO Class 5 or better. With ULPA U15/U16 filters, it can achieve ISO Class 3 or better.

Q6: Can the EFU be customised for specific semiconductor tools?
A: Yes. Deshengxin offers custom dimensions, frame materials, efficiency grades, control interfaces, and even custom shapes (L‑shaped, circular, or notched).

Q7: What is DSX's production capacity?
A: Deshengxin operates a substantial manufacturing facility with full-chain production capabilities, enabling rapid response to large-volume orders and custom solutions with short lead times.

Q8: What industries use Deshengxin EFUs?
A: Semiconductor manufacturing (lithography, etching, coating, wafer handling), lithium battery production, flat panel display (LCD/OLED), SMT & electronics manufacturing, and precision equipment.

Why Choose Deshengxin
Why Choose Deshengxin for Semiconductor EFU Solutions?

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Advantage Description
True Full-Chain Manufacturing Motors, fans, and control systems designed and produced entirely in-house — not assembled from third-party
 components
Industry-Leading Thin Profile 70mm fan housing (~100mm total installed) — one of the thinnest EFU designs available globally
Low Vibration & Low Noise Aerospace-grade dynamic balance calibration meets EUV lithography and wafer inspection tool criteria
Customisation Capability Non-standard dimensions, shapes, frame materials, efficiency grades, and control interfaces available
Proven Quality Assurance 100% tested with particle counter scan leak detection; individual test certificates available
Cost-Effective Innovation Direct-from-factory pricing via vertical integration — no intermediary markups
Scalable Bulk Order Capacity Massive manufacturing facility with industrial-scale production capacity for fab construction

 

Resources & Contact

 
EFU Product Overview — 链接到 /efu.html,Full EFU product portfolio
 
 
  FFU(HEPA Filter Unit) /EFU/BFU Solution
 

Related File Downloads

Name Introduction Downloads Thumbnail Copy Link Download
DSX_ Company Introduction DSX_ Company Introduction∏ Description&Partial Case Introduction.pdf 2937 download Copy Link Download
FFU (Fan Filter Unit) Installation Instructions -2024.10.14 FFU installation notes caution against fume, gas, dust, and humidity. 3013 download Copy Link Download
Optimization Suggestions for FFU System's Airflow Control Optimization Suggestions for FFU System's Airflow Control 2931 download Copy Link Download

 

Advantages of Deshengxin

 

Large-scale factory

  • Specializing in Centrifugal Fans and Purification Equipment

    As a manufacturing company specializing in  cleanroom equipment (such as FFU, air showers, air filters, HEPA boxes, clean benches, pass boxes, and weighing rooms), we offer high-quality products with a strong production capacity and technical expertise at competitive prices.

  • Complete Industrial Chain Production System
    With a complete industrial chain production system spanning from raw material procurement to production, quality assurance, and sales, we meticulously control every step to ensure the stability and reliability of our products.
  • Modern Facilities and Experienced Staff for Efficient Production
    Our modern industrial facilities, spanning nearly 30,000 square meters, coupled with our experienced staff, ensure that our production capacity can handle large orders efficiently. Choosing us means gaining access to not just high-quality cleanroom equipment, but also benefiting from our professional services and support.
  • Comprehensive Solutions and Dedicated Customer Support

    We are committed to providing comprehensive solutions tailored to meet your specific needs and creating greater value for your business through our dedication to quality, reliability, and customer satisfaction.

Strong research and development capabilities

  • Advanced R&D Capabilities and Cutting-Edge Equipment

    Our company's distinct advantage lies in our robust research and development capabilities, supported by a highly skilled team and state-of-the-art R&D equipment.

  • Expert Team and Multidisciplinary Expertise
    Our R&D teams are comprised of experts in various fields including motor development, control system software and hardware engineering, as well as purification equipment and engineering.
  • Patent Recognition and High-Tech Enterprise Status
    We have successfully secured multiple patents and have been recognized as a high-tech enterprise, underscoring our commitment to technological advancement and intellectual property protection.
  • Innovative Culture and Collaborative Approach

    Our dedication to research and development extends beyond technical proficiency. We cultivate a culture of collaboration and creativity within our teams, promoting interdisciplinary problem-solving approaches and encouraging innovative thinking.

  • Tailored Solutions and Professional Expertise
    By leveraging diverse perspectives and skill sets, we are able to address complex challenges with holistic solutions that surpass expectations.
    No matter the complexity of your requirements, you can rely on us to deliver tailored, professional solutions that meet your specific needs.

Advantages of the entire industry chain production

  • Strategic Advantage in Cleanroom Equipment Manufacturing

    As a primary manufacturer with expertise in cleanroom equipment, we maintain a strategic advantage throughout the entire production chain.

  • Vertical Integration for Superior Quality and Efficiency
    Key components such as motors, fans, filters, and other purification equipment are all produced in-house, starting from raw material procurement through manufacturing to final product delivery.
  • End-to-End Control for Cost Efficiency and Quality Assurance
    This end-to-end control enables us to effectively manage costs and uphold the highest standards of product quality specifically tailored for cleanroom environments.
  • Eliminating Profit Losses Through Supply Chain Oversight

    By overseeing the entire supply chain, we eliminate profit losses associated with intermediary stages, providing competitively priced solutions to meet cleanroom requirements.

  • Seamless Production Process for Cost-Effective and High-Quality Cleanroom Equipment
    Partnering with us offers access to a seamless production process characterized by cost efficiency and uncompromising product excellence for cleanroom equipment at every step.

     

Excellent quality control

  • Rigorous Quality Control: A Key Element in Our Production Process

    With our expertise in producing purification equipment across the entire industrial chain, we excel in implementing rigorous quality control measures at every stage.

  • From Material Selection to Final Product Delivery: Our Meticulous Quality Tests and Inspections
    Includes meticulous attention to raw material selection, production processes, and quality standard adherence. From material inspections to final product delivery, our products undergo stringent quality tests and inspections.
  • Reliable Suppliers, Consistent Quality: Ensuring the Best Raw Materials for Our Products
    By cultivating long-term relationships with reliable suppliers, we ensure the quality and consistency of raw materials used.
  • Durability and Performance Guaranteed: Our Commitment to High-Quality Materials and Standards

    Our commitment to utilizing only high-quality materials guarantees the durability and performance of our products. Focusing on quality control at every production phase, we are dedicated to providing customers with top-quality products and services.

Large-scale production capacity

  • Strategic Investments Drive Manufacturing Efficiency

    Our robust large-scale production capacity, supported by substantial investments in production equipment, technological research and development, and human resources, significantly boosts our manufacturing efficiency.

  • Competitive Edge in Large-Scale Order Fulfillment
    This strategic focus empowers us to effectively meet the demands for large-scale orders from our customers, giving us a noteworthy competitive edge in the market. The expansion of our operations enables us to refine processes, maximize production output, and accommodate clients with diverse order sizes.
  • Maintaining Market Position Through Efficiency and Scalability
    By prioritizing efficiency and scalability, we excel in fulfilling bulk orders and maintaining a strong market position in a competitive landscape.

Flexible Delivery Times

  • Powering Production Capacity with Premier Industrial Facility

    Our company's competitive edge lies in our state-of-the-art industrial facility that covers almost 30,000 square meters, enabling us to significantly boost our production capacity and maintain substantial resource reserves.

  • Adaptability and Precision in Meeting Delivery Deadlines
    One of the key advantages we offer to our customers is the flexibility in delivery times that we can provide. Regardless of the volume or complexity of orders, our agile production schedules can be tailored to align with the specific requirements and timelines of our clients.
  • Punctuality and Reliability: Our Commitment to Customers
    Our enhanced adaptability ensures seamless order fulfillment, consistently meeting a wide range of delivery deadlines with precision and efficiency.
  • Swift Operational Adaptability: A Reliable Partner for Timely Supply Chain Solutions
    By being able to pivot and adjust our operations swiftly, we solidify our position as a trustworthy and dependable partner for customers who prioritize punctuality and reliability in their supply chain needs.

Rich Industry Experience

  • Rich Industry Experience

    With 20 years of experience in the production of purification equipment, we have amassed a wealth of industry knowledge and practical expertise that sets us apart.

  • Tailored Solutions for Diverse Industries
    Our deep-rooted understanding of various sectors' demands and requirements for purification products enables us to deliver targeted and customized solutions to meet our customers' needs effectively.
  • Innovating Industry Solutions Through Experience and Collaboration
    Our extensive industry experience enables us to provide customized solutions for clients and stay abreast of evolving industry trends. The collaborative efforts between our technical departments drive faster progress and help us become leaders in the industry.
  • Trusted Partner for High-Quality Solutions
    The combination of industry insights and extensive practical experience makes us a trusted partner capable of providing high-quality purification products that exceed industry standards.



 Reasonable pricing strategy 

  • Affordable Excellence: High-Quality Purification Equipment

    We are committed to offering high-quality products at reasonable prices, a commitment that extends to our range of purification equipment, including FFUs, air showers, clean benches, weighing rooms, pass boxes, and cleanroom projects.

  • Effective Cost Control for Competitive Pricing
    Our vertically integrated production chain allows us to implement effective cost control measures, providing our customers with highly competitive prices to ensure that our purification equipment offers great cost-effectiveness.
  • Top-Tier Quality and Unbeatable Value in Cleanroom Equipment
    By combining expertise in cost management with a dedication to producing top-tier products, we are able to offer purification equipment that meets rigorous quality standards while providing excellent value.
  • Customer-Centric Strategy: Delivering Cost-Effective Solutions
    Our outstanding commitment to product quality and pricing strategies showcases our unwavering focus on customer satisfaction, as well as our ability to deliver cost-effective solutions that exceed expectations.
  • Reliable Quality, Competitive Prices: Your Trusted Source for Cleanroom Equipment
    Trust us to provide you with high-quality purification equipment at competitive prices. Our commitment is to offer value and reliability.





 Comprehensive service system 

  • Comprehensive Customer-Centric Service System

    Our service system is designed to support our clients at every stage of their journey with us. Whether you require pre-sales consultation, assistance during the sales process, or support after your purchase, our dedicated team is here to assist you every step of the way.

  • Wide Range of Purification Equipment and Services
    From centrifugal fans to FFUs, air shower rooms, clean benches, weighing rooms, pass boxes, and complete cleanroom projects, we offer a comprehensive range of purification equipment to meet your needs.
     
  • Customer Satisfaction as Our Top Priority
    Our customer-centric approach ensures that we prioritize your satisfaction above all else. We strive to exceed your expectations by delivering professional technical support services tailored to your individual needs.
  • Building Lasting Relationships Through Trust and Satisfaction
    By focusing on personalized service and technical expertise, we aim to build lasting relationships with our customers based on mutual trust and satisfaction. Our dedication to customer service sets us apart as a trusted partner in the industry.

Compare Deshengxin with other companies

 

Sheet metal equipment

Cutting equipment for comparing boards
In the production of cleanroom purification equipment, DSX utilizes Amada CNC turret punch presses and multiple high-power laser cutting machines, offering several significant advantages. The CNC punch press combines the advantages of precision cutting and high-speed production, enabling fast and accurate completion of various cutting tasks to enhance production efficiency.Laser cutting technology offers high precision, non-contact processing, and the simultaneous operation of multiple high-power laser cutting machines increases production capacity and flexibility.
By combining CNC punch presses and laser cutting machines, DSX cutting equipment can achieve high-precision cutting on various materials and thicknesses, ensuring cutting quality and accuracy.

Some competitors in the industry have only a limited number of cutting equipment, resulting in poor cutting efficiency. This, in turn, increases manufacturing costs, reduces production efficiency, and impacts product quality.

 

Comparison of bending processes

 

Compared to competitors in the production of cleanroom purification equipment, DSX utilizes automatic bending centers and multiple CNC press brakes to offer several advantages. Firstly, the automatic bending centers streamline the bending process, enhancing production efficiency and accuracy. Secondly, the CNC press brakes provide precise bending capabilities, ensuring consistency and high-quality bends. Additionally, DSX boasts advanced production equipment and skilled technicians, resulting in products with higher precision and efficiency. This integration improves production speed, product quality, and ensures customer satisfaction.

Comparison of other items

 
Advantages of In-House Production of Motors and Fans for Cleanroom Equipment
  • In-House Produced Motors and Fans for Trusted Cleanroom Purification Equipment

    Our clenroom purification equipment utilizes motors and fans that are produced in-house, Our fans are known for their low noise, high air volume, stable operation, and long lifespan.

  • Customization Expertise
    Our team of experienced motor engineers can easily adjust parameters to meet customer requirements and unique specifications. This customization flexibility allows us to cater to diverse client needs and preferences, giving our products a competitive edge in the market.
  • Supply Chain Independence:
    DSX's internal production control ensures consistent quality and on-time delivery of cleanroom equipment, reducing risks associated with external suppliers.
  • Customization Expertise:

    With a team of experienced motor and fan engineers, we offer easy parameter adjustments to meet customer requirements and unique specifications. This customization flexibility enables us to cater to diverse client needs and preferences.

  • Cost competitiveness:

    DSX has the entire production chain, which allows for better control of manufacturing costs, process optimization, and potentially reducing production expenses. This cost competitiveness can be translated into competitive pricing for customers.

  • Strengthened Communication and Coordination:
    Internal production enhances communication and coordination among manufacturing departments.This process optimization improves efficiency, speeds up decision-making, and enables more flexible responses to customer needs and market changes.

Challenges of Competitors’ External Sourcing

 

1. Quality Control Challenges: Reliance on externally sourced motors and fans may lead to difficulties in maintaining consistent quality standards across products.

 

2. Limited Customization: Competitors may face constraints in offering customization options to clients due to dependencies on external suppliers.


3. Supply Chain Risks: External sourcing introduces vulnerabilities related to supply chain disruptions, potentially affecting product availability and delivery schedules.

4. Communication Issues: Dealing with multiple suppliers can lead to miscommunications, delays, and coordination challenges, impacting overall operational efficiency.

5. Cost Increases: External dependencies can result in cost fluctuations, affecting pricing competitiveness in the market and overall profitability.

 

By leveraging our in-house production capabilities, we offer a strategic advantage that ensures superior quality, flexibility in customization, enhanced supply chain control, and cost competitiveness, setting us apart from competitors relying on external sourcing.

 
Maximizing Quality and Flexibility: The In-House Advantage in Air Filter Production for Cleanroom Purification
  • Elevating Performance: In-House Manufacturing of Air Filters

    All air filters integrated into our cleanroom purification products are exclusively manufactured in-house by our company, offering a multitude of advantages.

  • Uncompromising Quality: Stringent Control Standards for Air Filters
    This internal production capability allows us to uphold stringent quality control standards, ensuring that each filter meets our exacting performance and durability criteria.
  • Tailored Solutions: Customizing Air Filters for Specific Requirements
    It grants us the flexibility to customize filters to suit specific requirements, enhancing our ability to cater to a diverse range of customer needs.
  • Strengthening Supply Chain: In-House Manufacturing Benefits

    By reducing reliance on external suppliers, in-house production enhances supply chain stability, minimizing the risk of disruptions and quality issues.

  • Efficiency Boost: Seamless Integration of Air Filters for Cost Savings

    Seamless integration of internally produced air filters with our purification products optimizes overall system efficiency, while potentially leading to cost efficiencies by eliminating markups and streamlining production processes.

Competitive Advantage: In-House Manufacturing of Air Filters Sets Us Apart

 
Most competitors' purification equipment rely on externally sourced filters, posing potential risks in quality control, supply chain stability, customization capabilities, and production efficiency.
 
Enhancing Operational Efficiency: The In-House Control System Advantage
  • Tailored Excellence: Custom Solutions Engineered for You
    Our control system is designed and developed by experienced engineers to provide tailored solutions to meet specific customer needs.
  • Efficiency Unleashed: Prompt Responses and Top-Notch Integration
    This autonomy allows us to respond promptly to customer demands, seamlessly integrate with our products, and ensure top-notch quality and reliability.
  • Innovative Solutions: Boosting Performance and Satisfaction
    With our extensive in-house expertise, we specialize in delivering customized solutions that boost performance, enhance user experience, and increase overall satisfaction for our clients.

External Control Systems: Limitations of Off-the-Shelf Solutions for Industry Peers

 
The vast majority of industry peers opt for externally procured control systems. These off-the-shelf systems often lack customization to meet specific needs, resulting in reduced flexibility and potential performance limitations.

Moreover, reliance on external vendors can lead to longer response times for issue resolution or modifications, causing delays in critical operations. Challenges may arise in integrating these systems with existing products and processes, impacting overall system performance.

Concerns about the quality and reliability of externally sourced control systems persist due to limited oversight of development processes and quality assurance measures. In essence, while prevalent, external control systems come with limitations including customization constraints, response time delays, integration challenges, and quality control issues that can impede operational efficiency.
 
测试---The vast majority of industry peers opt for externally procured control systems. These off-the-shelf systems often lack customization to meet specific needs, resulting in reduced flexibility and potential performance limitations.
 
Welcome to Contact Us
Tell us your cleanroom requirements and receive a customized FFU solution within 24 hours.
Our engineering team is ready to support your project with professional solutions.
We look forward to hearing from you.
As a leading provider of Cleanroom equipment in China, we have a professional sales team, extensive suppliers, a deep market presence, and excellent one-stop services.

CONTACT US

Phone:+86-0512-63212787-808
Email: nancy@shdsx.com
WhatsApp:+86-13646258112
Add:No.18 of East Tongxin Road, TaihuNew Town, Wujiang District, Suzhou City.Jiangsu Province, China

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