EFU with Built‑in LCD Smart Control Panel – Equipment Fan Filter Unit for Semiconductor & SMT

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DSX EF-DE400H45x1 Equipment Fan Filter Unit (EFU)

EFU with Built‑in LCD Smart Control Panel – Equipment Fan Filter Unit for Semiconductor & SMT

Deshengxin DSX-F-DE280-ESD is a machine-mounted mini EFU (Equipment Fan Filter Unit) designed for precision automation equipment in semiconductor, SMT, and microelectronics production lines. Available with or without an anti-static ionizer module, it delivers a stable 2.0 m/s average face air velocity with uniform airflow and no dead zones. The self-developed front LCD intelligent control panel displays real-time fan RPM, filter life, communication status, and fault alarms. Equipped with RJ45 and RS485 ports supporting MODBUS protocol for remote centralized control. HEPA filter achieves 99.995% efficiency for 0.3μm particles, meeting ISO Class 5~6 clean standards. Customizable size, voltage, wind speed, and ionizer configuration available.

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Model:
Customization
Brand:
DSX
Size:
1175*1175*300
Customized support:
OEM, ODM
Warranty:
1 Year
Certification:
CCC/CE/ISO9001

EFU equipment fan filter unit mini FFU machine-mounted FFU anti-static EFU ionizer EFU semiconductor cleanroom equipment SMT production line purification HEPA filter fan unit ESD protection fan filter unit

Product Display

Product Introduction

Workshop Introduction

FAQs

DSX F-DE280-ESD EFU Equipment Fan Filter Unit Product Overview

Wujiang Deshengxin independently develops and manufactures the F-DE280-ESD EFU, also known as machine-mounted mini FFU. Our entire control system is self-researched and developed. This unit is specially designed for local internal purification of precision automation equipment. Different from large ceiling FFUs for cleanrooms, this compact EFU fits the narrow installation space inside SMT, semiconductor and microelectronic processing equipment, delivering stable high-clean airflow for core working areas of machines.

Two versions are optional for different production demands: EFU with Anti-Static Ionizer Module for ESD Protection and EFU without Ionizer Module. It provides a steady average face air velocity of 2.0m/s with even air distribution and no dead zones, maintaining a long-term micro clean environment inside equipment.

Deshengxin Equipment Fan Filter Unit (EFU) equipped with an additional anti-static ionization module to prevent electrostatic discharge (ESD) in semiconductor and electronics manufacturing

EFU with Anti-Static Ionizer Module for ESD Protection

Standard Deshengxin Equipment Fan Filter Unit (EFU) without the anti-static ionization module, designed for high-uniformity airflow and efficient particle filtration in controlled environments

EFU without Ionizer Module

Basic Model Parameters

Model:	DSX-F-DE280-ESD
Cabinet Material:	Cold rolled steel plate
Overall Dimension:	450450120mm
Power Supply:	110/220V 50Hz
Filtration Efficiency:	99.995% for 0.3μm particles with HEPA filter
Average Face Air Velocity:	2.0 m/s ±20% (Custom wind speed available upon request)
Optional Configuration:	With ion net / Without ion net
Control System:	Self-developed front LCD intelligent control panel

Core Product Advantages

1. Dual Optional Ion Net Versions to Match Various Anti-static Requirements

Two configurations are available to cover all electronic production scenarios:

Version with ion net: Built-in ion static elimination mesh quickly neutralizes static charges in airflow to avoid electrostatic breakdown of chips, wafers and precision components. Ideal for high-sensitivity semiconductor packaging and SMT chip mounting processes.
Standard version without ion net: Cost-effective basic purification solution focusing on high-efficiency dust filtration, suitable for general equipment that only requires dust removal.

2. Stable Uniform 2.0m/s Face Air Velocity, Customizable Wind Speed Supported

Optimized air outlet duct structure ensures a constant average wind speed of 2m/s across the whole filter surface, with uniform airflow free of turbulence and dead zones. It rapidly removes solder dust, tiny particles and suspended pollutants inside enclosed equipment to sustain stable cleanliness standards.

Note: Custom face air velocity can be customized according to customers’ actual equipment purification demands.

3. Built-in LCD Digital Display for Intuitive Equipment Management

The front-mounted LCD screen displays all operating data in real time without extra testing devices:

Set & real-time fan RPM
Remaining filter service life reminder
Equipment communication address and running status
Fault alarm prompt

Equipped with ON/OFF, UP/DOWN speed and SETTING buttons, it supports fan speed adjustment, filter life reset, communication address configuration, air volume calibration and other parameter settings. On-site staff can complete equipment debugging and daily inspection efficiently to simplify operation and maintenance. The whole control program is independently developed by our team, fully adapted to electronic production line scenarios.

4. Dual Communication Ports for Remote Centralized Control

Standard RJ45 network port and RS485 terminal are equipped, compatible with MODBUS communication protocol. Real-time operating data can be uploaded to the factory central control system. The ALARM indicator instantly feeds back abnormal signals, and the NET_RST reset button speeds up network troubleshooting, enabling unified remote management of multiple EFUs on production lines. Our self-developed control program can connect with all types of production line central control systems.

5. Energy-saving EC Brushless Motor with Stepless Speed Regulation

The fan supports adjustable speed up to 3000 RPM. Stepless speed regulation flexibly meets different cleanliness standards. It features low noise, low power consumption and long service life to cut long-term factory operation costs.

6. High-efficiency HEPA Filtration & ESD Anti-static Body

The HEPA filter achieves 99.995% filtration efficiency for 0.3μm particles, blocking fine dust, solder splashes and suspended workshop pollutants to reach ISO Class 5~6 micro clean standard inside equipment. The whole machine is treated with anti-static coating to prevent static accumulation during air circulation and protect precision electronic components from static damage.

Applicable Industries & Equipment

SMT Production Lines: Solder paste printers, chip mounters, AOI optical detectors, reflow ovens
Semiconductor Precision Equipment: Wafer dicing machines, probe stations, chip packaging molding machines
Microelectronic assembly and optical module testing equipment
Micro lithium battery cell processing equipment

Deshengxin Factory Strength

We are a professional EFU & FFU manufacturer based in Wujiang, Suzhou. We complete full independent R&D, sheet metal processing, motor assembly and filter matching in-house, with all control systems self-developed. We support customized size, voltage, communication protocol, ion net configuration and wind speed for special automation equipment. We supply supporting products, OEM & ODM services and full after-sales technical support for automation equipment manufacturers worldwide.

Send us your equipment drawings and purification requirements to get customized EFU quotations and complete technical datasheets!

EFU Introduction

Versatile EFU Systems with Customizable Materials, Motors, and Controls

Optional ontology materials: steel plate paint, stainless steel 304, 316, 201, 430, aluminum plate
Optional multiple efficient EC/DC/AC motors
Can be controlled individually, can be centrally controlled by computer network, can be remotely monitored
Filters can be made of fiberglass, PTFE, and can be selected with HEPA, ULPA filters of various filtration levels.
"Optimize Automated Equipment Performance with Deshengxin's EFUs"

Deshengxin is a leading expert in the production of EFU (equipment fan filter unit, offering a wide range of specialized solutions tailored to the unique requirements of your automation equipment. Our commitment to precision ensures that our EFUs are of the highest quality, delivering exceptional performance and reliability. With our expertise, we empower your automation machinery to operate at peak efficiency, enabling you to achieve superior results in your operations.
"Streamline Operations with Deshengxin's User-Friendly EFU Equipment Fan Filter Unit"

The Deshengxin EFU (equipment fan filter unit) not only offers outstanding performance but also prioritizes user convenience. It is designed with a user-friendly interface and intuitive controls, enabling effortless operation and adjustment. The unit is equipped with quick-release mechanisms, facilitating easy filter replacement. Its ergonomic design and hassle-free maintenance provide users with a seamless experience.

"Customize Air Filtration with Deshengxin's Versatile EFU Equipment Fan Filter Unit"

Our EFU (Equipment Fan Filter Unit) offers a wide range of filter media options, including fiberglass, PTFE (Polytetrafluoroethylene), and optional HEPA (High-Efficiency Particulate Air) and ULPA (Ultra-Low Penetration Air) filters, ensuring versatility to meet your specific needs. You can choose from different filtration levels such as H13, H14, U15, and U16, guaranteeing the highest level of air quality for your equipment. With these multifunctional filter choices, you can confidently maintain a clean and pure environment for sensitive processes and operations.
Suitable for special occasions

In addition to our standard EFU units for general environments, we have also specifically designed EFU units for automation equipment in the lithium battery industry, such as winding machines and stacking machines. These high-protection EFU units are suitable for environments with high levels of dust.
Assemble in a clean room

To ensure quality, all of our FFU (Fan Filter Unit) and EFU (Equipment Filter Unit) products are manufactured in dust-free rooms. These controlled environments are designed to maintain strict cleanliness standards during production processes. By manufacturing our products in dust-free rooms, we can minimize the risk of contamination and deliver high-quality air filtration solutions to our customers.

EFU Controller Introduction

EC Equipment Filter Unitcontroller

Can be controlled locally on a single machine;
Can be controlled by computer group or upper computer;
Can be controlled by touch screen ( can operate on duty);Capable of monitoring the operating status of FFU, with alarm function and wind pressure monitoring function;
Customize matching control programs based on differentcommunication methods and needs of customers;
The baud rate can be customized according to customerrequirements;
The control program can be displayed in multiple languages;
AC FFU controller

IEnhanced Control Options for Efficient FFU Management and Monitoring
- Local Control: Easily manage FFUs on individual machines for localized control and operation.
- Group Control: Efficiently control and monitor FFUs across multiple machines via computer or upper-level management systems.
- Touchscreen Interface: Seamlessly operate and manage FFUs with
Customizable Equipment Filter Unit Control System: Enhancing Efficiency and Performance

Our Equipment Filter Unit control system is designed and developed by our own engineers, providing exceptional flexibility and customizability. With meticulous attention to detail, our control system offers a wide range of customization options to meet specific customer requirements. Whether it is programming the control interface, adjusting baud rates, or choosing a preferred language for the display, our control system can be personalized to suit different communication methods and customer needs. This level of customization ensures seamless integration with existing systems and enhances the overall efficiency and performance of our EFUs.

Workshop Introduction

FAQs

What is EFU (Equipment Fan Filter Unit)?

The EFU, or Equipment Fan Filter Unit, is a device specifically designed for air filtration and ventilation in equipment applications, particularly in cleanrooms. EFUs are used to maintain the cleanliness and particle-free environment required for sensitive equipment found in industries such as semiconductor manufacturing, biotechnology, pharmaceuticals, and other technology-driven fields.

EFUs are typically installed on or near the equipment itself, rather than on the cleanroom ceiling like traditional FFUs (Fan Filter Units). They are designed to be compact, easily attached to the equipment, and provide localized air filtration and circulation.

The EFU consists of a fan and a filter section. The fan helps to create airflow, which draws in ambient air from the surrounding environment and passes it through the filter section. The filter section is responsible for removing particles, pollutants, and contaminants from the incoming air, ensuring that only clean, filtered air is delivered to the equipment.

The filters used in EFUs are high-efficiency filters, such as HEPA (High-Efficiency Particulate Air) or ULPA (Ultra-Low Penetration Air) filters. These filters are capable of capturing particles as small as 0.3 micrometers with high efficiency, ensuring the desired level of cleanliness is maintained.

EFUs are also equipped with control systems that allow for variable airflow and fan speed adjustments, enabling precise control of air quality and flow rates to meet the specific requirements of the equipment being served.

Deshengxin EFU plays a crucial role in maintaining the cleanliness and performance of sensitive equipment in cleanroom environments, ensuring the production of high-quality products and minimizing the risk of contamination.
What is the difference between EFU (Equipment Fan Filter Unit) and FFU (Fan Filter Unit)?

The EFU (Equipment Fan Filter Unit) is a device used in cleanrooms and is similar to the commonly seen FFU (Fan Filter Unit), but there are some differences between the two.

The EFU is specifically designed for equipment application, such as photolithography machines, stockers, indexers, coaters, and cleaning machines, while the FFU is generally used in cleanrooms and installed on the ceiling.

In terms of installation, FFUs are standalone devices typically installed horizontally on the ceiling with the help of gravity and sealing installation with filters and ceiling grids. On the other hand, EFUs have a more complex installation process. The EFU box and filter are usually fixed together with bolts and nuts, and the EFU unit is then securely fixed to the equipment using dedicated mounting brackets and bolts.

Furthermore, EFUs have different specifications, material requirements, maintenance methods, control systems, and operating parameters compared to FFUs. The thickness, dimensions, and material requirements of EFUs are specifically designed to meet the requirements of equipment applications. The maintenance methods may also vary, depending on the specific design and configuration of the EFU. The control systems used in EFUs may differ from the ones used in FFUs, and the operating parameters such as airflow and pressure may also be specifically tailored for equipment needs.

Overall, the EFU and FFU have different applications, installation methods, specifications, and operating parameters, highlighting their distinctive features and functionality in different cleanroom environments.
What is the working principle of EFU (Equipment Fan Filter Unit)?

The working principle of the EFU (Equipment Fan Filter Unit) involves the following steps:

1. Air intake: The EFU is designed to draw in ambient air from the surrounding environment. It may have an intake grille or ducts for air intake.

2. Fan operation: The EFU is equipped with a fan that helps create airflow. The fan generates suction or positive pressure, depending on the specific application, to draw or push air through the unit.

3. Air filtration: The incoming air passes through the filter section of the EFU. This section usually contains high-efficiency filters like HEPA (High-Efficiency Particulate Air) or ULPA (Ultra-Low Penetration Air) filters. These filters are designed to capture very small particles, typically 0.3 micrometers in size or smaller, with high efficiency.

4. Particle removal: As the air flows through the filter section, the filters trap and remove particles, pollutants, and contaminants present in the air. These may include dust, bacteria, viruses, pollen, and other airborne particles.

5. Clean air delivery: The cleaned and filtered air is then delivered to the equipment being served. The EFU ensures that only clean, particle-free air reaches the equipment, helping maintain a controlled and clean environment around the equipment.

6. Variable airflow control: EFUs often come equipped with control systems that allow for variable airflow and fan speed adjustments. This enables precise control of air quality and flow rates to meet the specific requirements of the equipment being served.

Overall, the working principle of the EFU revolves around drawing in ambient air, filtering it through high-efficiency filters, and delivering clean air to the equipment in order to maintain a clean and controlled environment for sensitive equipment applications.
I don't know much about the EFU product. Can I purchase a suitable EFU from your company?

If you find yourself lacking knowledge about EFU (Equipment Fan Filter Unit ) products and their applicability, don't worry! Our company is here to provide you with the perfect EFU solution. Our team of professionals is dedicated to understanding your needs and helping you achieve the desired results. Now, let's delve deeper into the world of EFUs and explain how our expertise can assist you in finding the most suitable solution for your situation.

Understanding EFU products:
EFUs are installed above machinery or microenvironment equipment in cleanrooms, such as lithography machines, stockers, IJL (indexers), coaters, and cleaning machines. They provide filtration and airflow control to maintain clean and controlled conditions. These units typically consist of fans, electric impellers, filters, and other necessary components. They play a crucial role in effectively removing particulate matter and contaminants while ensuring the cleanliness of the surrounding air.

Our commitment to customer satisfaction:
At our company, customer satisfaction is paramount. Our goal is to understand your unique circumstances, specifications, and expected outcomes. With this information, our experienced team members can guide you in selecting the most suitable EFU for your application.

Tailored recommendations:
To ensure that we meet your expectations, communicating your actual requirements and desired outcomes is crucial. Whether you require specific airflows, noise levels, or filtration efficiency, our professionals consider all of these factors. We understand the subtle differences in various industries and cleanroom applications and will work closely with you to determine the best EFU((Equipment Filter Unit) solution.

Expert guidance and support:
Our team consists of extensively trained professionals with in-depth knowledge of EFUs and cleanroom technology. When you present your requirements to us, our experts will analyze your situation and provide comprehensive guidance to help you make informed decisions. Whether you need a single EFU or multiple units, we will ensure that the recommended solution perfectly aligns with your expectations.

Beyond product selection:
Our support doesn't stop at selecting EFUs. We offer end-to-end assistance, including installation guidance, maintenance recommendations, and troubleshooting support. With our expertise, we aim to build a lasting partnership that goes beyond the initial purchase, ensuring the smooth operation and longevity of your EFU system.

Conclusion:
Lack of knowledge should not hinder you from obtaining the right product that meets your requirements when it comes to EFUs. Our company is committed to providing tailored EFU solutions that precisely meet your specifications. By entrusting your specifications and desired outcomes to us, you can rely on our professional team for guidance throughout the selection process. Let us help you find the perfect EFU and become your trusted partner in ensuring a clean and efficient cleanroom environment.
Can I customize the EFU instead of getting the regular model?

Certainly! In fact, due to the specific nature of the EFU（Equipment Fan Filter Unit） operating environment, most EFU units are custom-made. We understand that each facility may have unique requirements and specifications, and we are capable of providing customized EFU solutions tailored to your needs.

To customize an EFU, we will work closely with you to understand your specific requirements and expectations. This includes factors such as airflow volume, noise levels, and filtration efficiency. Our experienced team will analyze your situation and guide you through the customization process, ensuring that the final product meets your desired specifications.

During the customization process, we will consider various factors to ensure the EFU is perfectly suited to your application. This may include adjustments to the size, shape, or configuration of the unit to fit your space constraints. We will also take into account any specific filtration requirements, such as high-efficiency particulate air (HEPA) filters for critical environments.

With our expertise and knowledge in EFU technology, we can assist you in selecting the right components, filters, and configurations for your customized EFU equipment filter unit . Our commitment to customer satisfaction means that we will work closely with you to deliver a solution that not only meets your specifications but also provides optimal performance and efficiency.

Whether you need a single customized EFU or multiple units for a larger facility, we are here to support you. Our professional team will provide guidance throughout the customization process, ensuring that your customized EFU solution is perfectly tailored to your needs.

So yes, you can definitely customize the EFU instead of getting the regular model. We are ready to work with you to meet your unique requirements and provide you with a customized EFU solution that best fits your application.
Why choose your company over other manufacturers?

We have complete control over the entire production process, from sourcing raw materials to manufacturing and final product delivery. This allows us to better control costs and ensure product quality.

1. Advanced Manufacturing Equipment: Our sheet metal processing equipment includes AMADA CNC punching machines, laser cutting machines, CNC bending centers, and laser welders. In comparison, many of our competitors only have basic equipment such as laser cutters, bending machines, and argon arc welders. Our advanced equipment enables higher precision and efficiency in production, resulting in higher quality products.

2. Fan Manufacturing Expertise: We have many years of experience in fan development and production. Unlike most of our competitors who purchase motors and impellers externally, we produce our own motors and impellers. We have a team of experienced motor engineers who can flexibly adapt and adjust parameters to meet customer requirements. Our products undergo rigorous testing and verification in our advanced research and development laboratory prior to mass production. Each fan also undergoes three stages of testing during the production process to ensure product quality. Our fans are known for their low noise, high airflow, stable operation, and long lifespan.

3. Filter Production: We have a dedicated filter production line, while many purification equipment manufacturers even outsource their filters. All our filters are produced in cleanrooms and undergo strict testing to ensure quality.

4. Control Systems: We have our own control system development department and can customize solutions to precisely fit your needs. In contrast, our competitors typically rely on pre-purchased controllers with limited customization options.

5. Full Industry Chain Advantage: As a primary manufacturer, we have control over the entire production process, allowing us to better control costs and ensure product quality. By directly managing the supply chain, we can avoid profit loss from intermediaries and offer more competitive prices.

6. Excellent Quality Control: As the controller of the full industry chain, we can implement strict quality control measures, including material selection, production processes, and quality standards. This ensures that our products meet customer requirements and improves customer satisfaction and trust.

7. Flexible Delivery Times: With over 20,000 square meters of modern industrial plants, we have higher production capacity and resources to better meet customer delivery requirements. We can flexibly adjust production schedules according to customer demands and timelines to ensure timely order fulfillment.

8. Professional R&D Team: We have dedicated R&D teams for motors, fans, control systems, purification equipment, and cleanroom engineering. With our rich R&D experience and technical strengths, we can help customers solve problems throughout the entire industrial chain. We are happy to share our expertise and provide technical services, regardless of whether you purchase our products.

9.Advanced Technological Equipment: We have introduced advanced production and testing equipment from both domestic and international sources, including automated production lines and precision testing instruments. In addition, we have established a wind tunnel laboratory to further enhance our capabilities. With these advanced and specialized equipment, coupled with our professional team, we are able to maintain a high level of quality in both the development of new products and the production process.

10. High-Quality Material Sources: We have established long-term partnerships with reliable suppliers to ensure the quality and stability of our raw materials. We only use high-quality materials to guarantee product durability and performance.

11. Strong Production Capacity: We have the ability to meet customers' large-scale production and efficient delivery demands. We can flexibly adjust production plans based on your order volume to ensure on-time delivery and product quality.

12. Reasonable Pricing Strategy: Our full industry chain production allows us to better control costs, enabling us to provide high-quality products at competitive prices. We optimize costs while ensuring product quality, thereby creating greater value for our customers.

13. Comprehensive Service System: Customer-centricity is at the core of our service approach. We provide all-round support, whether it's pre-sales consultation, communication during the sales process, or after-sales service. We are committed to meeting your individualized requirements and providing customized solutions. Choosing to work with us not only saves you money and gives you peace of mind but also provides strong support from our dedicated team and products.
Do you have high-protection dust removal EFUs specifically designed for the lithium battery production industry?

Deshengxin understands the challenges faced by lithium battery production workshops in dealing with dust. To meet the needs of these customers, we have developed a high-protective dust removal EFU (equipment fan filter unit). This EFU is specifically designed for use in clean rooms for lithium battery production, as well as on automated equipment such as winding stacking machines and cutting winding machines.

Unlike other FFUs in the market, our EFU offers excellent cleanability and has a long lifespan. This means that it can effectively remove dust from the air, ensuring a clean and dust-free working environment. Its durability also means that it does not need to be replaced as frequently, resulting in cost savings for our customers.

Recently, we had the opportunity to replace a large batch of defective EFUs for one of our customers, and they were highly satisfied with our professionalism and the high quality of our product. We pride ourselves on being a reliable partner to the lithium battery industry, and we will continue to develop innovative solutions to meet the specific requirements of our customers.

We understand the importance of maintaining a clean production environment in the lithium battery industry, and our high-protective dust removal EFUs are designed to help achieve this goal. We are committed to providing top-notch products and exceptional service to our customers, and we are proud to have earned their trust and positive feedback.
What are the advantages of Deshengxin's EFU solutions for the automation equipment industry?

Deshengxin is a renowned expert in the production of EFU solutions for the automation equipment industry. We understand that automation equipment requires specialized solutions, and we have dedicated a considerable amount of energy and resources to meet these unique requirements.

One of the key advantages of choosing Deshengxin is our in-house production of fans and control systems. This allows us to have complete control over the design and manufacturing process, resulting in superior quality and customization. We can seamlessly integrate our EFUs with your automation equipment, ensuring optimal performance and efficiency.

Our EFUs are specifically designed to meet the stringent demands of the automation industry. We take into consideration factors such as air cleanliness, noise levels, and energy efficiency. Our EFUs are equipped with high-quality filters that effectively remove particles and contaminants from the air, providing a clean and healthy environment for your automation equipment.

Additionally, we understand that each automation equipment requires unique specifications. Our team of experts works closely with your company to understand your specific needs and provide custom solutions. We take into consideration factors such as size, airflow requirements, and control options, to ensure that our FFUs are perfectly matched to your automation equipment.

With Deshengxin's EFU solutions, you can trust that your automation equipment will operate at optimal levels. Our dedication to precision, quality, and customization guarantees exceptional performance and reliability. Experience the power of Deshengxin's EFUs and enhance the efficiency of your automation equipment.